Finite element analysis of surface acoustic wave resonators
Surface Acoustic Wave (SAW) devices are key components in RF and IF stages of many electronic systems. A Surface Acoustic wave is a mechanical wave, which is excited on the surface of a piezoelectric substrate, when an alternating electric voltage is applied through a comb-like interdigital transducer (electrodes) patterned on it. Most SAW applications to date have been in the sub-2GHz region, but emerging applications require SAW devices at higher frequencies. The traditional models are inadequate to account for pronounced second order effects at the GHz range and also new microfabrication techniques are required to obtain quality devices as the critical dimensions shrink into the nano-scale range at these frequencies. The finite element method (a numerical method of solving differential equations) has the potential to account for these effects and ever increasing sub-micron processing capabilities of LIGA (X-ray lithography) present a promising outlook for high frequency SAW device modeling and fabrication respectively. A finite element model has been developed using commercial software ANSYS for one port SAW resonators and is presented in this thesis. The one port SAW resonators are generally connected in form of ladder networks to form low-loss SAW filters. The spacing between the electrodes and the velocity of the SAW determine the frequency of operation of these devices. A finite element model has been developed for three different types of SAWdevices namely Rayleigh, leaky and longitudinal leaky SAW (LLSAW). The LLSAW has higher velocity as compared to other two types and hence considered in this work as a good prospect for high frequency SAW devices. A full finite element model could not be solved due to high computing requirements and hence some assumptions were made and the results were validated against published results in the literature. The results indicate that even with simplifying assumptions and approximations FE model provides reasonably accurate results, that can be used in device design. Some of the simulations (in LLSAW based devices) in this work were also done with a view towards using LIGA (X-ray lithography) for fabrication of high frequency devices as they have the capability for high aspect ratios.
DegreeMaster of Science (M.Sc.)
SupervisorKlymyshyn, David M.
CommitteeKo, Seok-Bum; Johanson, Robert E.; Dodds, David E.; Torvi, David A.
Copyright DateJune 2006
Modal and harmonic analyses
Anisotropic piezoelectric substrates